Power America: Budget Period 5 Task 2.29 and 5.19
Philip Thomas Barletta
Project runs from 07/01/2019 to 06/30/2020
Task BP5-2.29: Implementation of SiC Block Process Steps to Aid Transition of SiC Technology Developments
With the support of PowerAmerica, X-FAB has established a 6-inch Silicon Carbide foundry line fully integrated within its 30,000 wafers/month silicon wafer fab. Due to its established reputation and full set of 6” SiC fabrication tools, X-FAB often receives inquiries from small organizations
that request small-batch SiC wafer processing. However, because of the small requested volumes, it is difficult to provide these companies access to the production capability of X-FAB. In order to service these requests, we propose to establish a small development fab with a set of standard process blocks in the NCSU Nanofabrication Facility (NNF). This would allow for an efficient
transfer into X-FAB’s production capacity from a more flexible University facility, as well as provide for development opportunity for next generation processes for SiC devices. This aligns with PowerAmerica’s larger strategy of providing companies access to SiC technology to accelerate innovation and adoption of SiC power devices in mainstream applications.
Task BP5-5.19: Development of Short Course for Wide Bandgap Power Devices in NCSU Core Facilities (Months 0-12)
The NCSU Nanofabrication Facility (NNF) and Analytical Instrumentation Facility (AIF) will work together to develop a two-day short course which will explore the science and technology underpinning wide bandgap (specifically, GaN and SiC) power devices. The target participants for this short course will be professional engineers and technicians, specifically those working in the silicon field who are interested the wide bandgap technology. Both undergraduate and graduate university students will be welcome as well.